Spherical silicon micro powder is mainly used for packaging large-scale, ultra large scale, and super large scale integrated circuits. The rapid development of the microelectronics industry has put forward increasingly high requirements for silicon micro powder. Silicon micro powder not only requires ultrafine, high purity, and low radioactive element content, but also demands spherical particle shape. High purity molten spherical silicon micro powder (spherical silicon micro powder) has good fluidity, small surface area, high packing density, and can achieve a high filling amount. It can be uniformly mixed with resin to form a film. The higher the filling rate of silicon micro powder, the smaller the expansion coefficient of the plastic sealing material, which is closer to the thermal expansion coefficient of single crystal silicon, and the better the performance of electronic components produced from it. The plastic encapsulation material made of spherical silicon micro powder has low stress concentration and high strength. The stress concentration of spherical silicon micro powder is only 60% of that of angular silicon micro powder. Therefore, when encapsulating integrated circuit chips with spherical silicon micro powder plastic encapsulation material, the yield rate is high, and it is not easy to cause mechanical damage during transportation and use.
Spherical silicon micro powder has no edges and corners, so it has less wear on the mold and a long service life. The packaging mold of the plastic sealing material is very precise and expensive. Using spherical silicon micro powder plastic sealing material can reduce mold costs and improve economic benefits.
At present, the production of spherical silica micro powder abroad includes processes such as high-temperature melt spraying, gas flame method, liquid-phase controlled ethyl orthosilicate, and hydrolysis of silicon tetrachloride. In recent years, many domestic research institutions and enterprises have been conducting research on spherical silica micro powders, but most of them are still in the laboratory research stage and have not yet entered the industrialization stage.